Development of a Micro-CMM

A high precision Micro-CMM (Coordinate measuring machine) is under development at the School of Instrument, Hefei University of Technology, in collaboration with National Taiwan University. The expected measuring range is 25 x 25 x 10 mm and the resolution is about 10 nm. For the enhancement of machine accuracy, some new design concepts are introduced, such as the arch-bridge and the co-planar stage. The coarse and fine motions of each axis can be achieved by the piezo-ceramic linear motor (PCLM). A linear diffraction grating interferometer (LDGI) is developed for the feedback of linear motion. In this report, the design principles of the developed Micro-CMM are described.